X-ray irradiation test of a MEMS-based X-ray optic

Tomohiro Ogawa,Yuichiro Ezoe,Takuya Kakiuchi,Masahiro Ikuta,Mayu Sato,Takaya Ohashi,Ikuyuki Mitsuishi,Kazuhisa Mitsuda,Kohei Morishita,Kazuo Nakajima

Optical MEMS and Nanophotonics（2014）

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摘要

MEMS technolgies can provide future space missions with ultra light-wight and high resolution optics. We conducted an X-ray irradiation test of our first MEMS-based Wolter type-I optic. However, a focus was weak and wide spread. Hence, we improved fabrication processes and an alignment system. In this paper, we report on results of the latest X-ray irradiation test of our new Wolter type-I optic. The angular resolution and effective area were 4.1 arcmin and 32 mm2 both of which are 3 and 40 times better than those in the first test.

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关键词

x-ray optics,micro-optics,micromechanical devices,mems,wolter type-i optic,x-ray irradiation test,x-ray optic,space missions,wolter type-i,fabrication,optics,accuracy,silicon

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