Athermal Silicon Slot Waveguide With an Ormocomp Polymer Overlayer
Photonics Technology Letters, IEEE （2014）
Key words
claddings,integrated optics,optical fabrication,optical polymers,optical waveguides,silicon,silicon compounds,thermo-optical devices,thermo-optical effects,Ormocomp polymer overlayer,Si,SiO2,athermal silicon slot waveguide,optical mode,proof-of-concept,slot waveguide geometry,thermo-optical coefficient,top cladding,Silicon photonics,athermal waveguides,integrated optics
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