Label-free optical biochemical sensor realized by a novel low-cost bulk-silicon based CMOS-compatible 3-dimensional optoelectronic IC (OEIC) platform
Electron Devices Meeting（2014）
摘要
We proposed and demonstrated label-free optical biochemical sensor realized on a novel bulk silicon-based platform with three-dimensional (3D) monolithic optoelectronic integration circuit (OEIC). The Ge-photodetector (Ge-PD) is integrated on bulk-silicon. Optical functional components are built with CMOS back-end-of-line (BEOL). Via this platform, the label-free optical biochemical sensor can get rid of the expensive SOI wafer. The costly tunable laser-source can be replaced by low cost wide-band light source. Optical signal is converted into electrical signal and read out by on-chip Ge-PD directly. This platform facilitates the development of cost-effective portable point-of-care (POC) diagnostic tool. Meanwhile, this also opens up new ways of electronic and photonic devices monolithically integration in 3D.
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关键词
cmos integrated circuits,chemical sensors,elemental semiconductors,germanium,integrated optoelectronics,monolithic integrated circuits,optical sensors,photodetectors,silicon,silicon-on-insulator,cmos back-end-of-line,oeic,si-ge,cost-effective portable point-of-care diagnostic tool,electrical signal,electronic devices,expensive soi wafer,label-free optical biochemical sensor,laser source,low cost wide-band light source,low-cost bulk-silicon based cmos-compatible 3-dimensional optoelectronic ic platform,monolithic optoelectronic integration circuit,on-chip ge-photodetector,optical functional components,optical signal,photonic devices
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