Label-free optical biochemical sensor realized by a novel low-cost bulk-silicon based CMOS-compatible 3-dimensional optoelectronic IC (OEIC) platform
Electron Devices Meeting(2014)
摘要
We proposed and demonstrated label-free optical biochemical sensor realized on a novel bulk silicon-based platform with three-dimensional (3D) monolithic optoelectronic integration circuit (OEIC). The Ge-photodetector (Ge-PD) is integrated on bulk-silicon. Optical functional components are built with CMOS back-end-of-line (BEOL). Via this platform, the label-free optical biochemical sensor can get rid of the expensive SOI wafer. The costly tunable laser-source can be replaced by low cost wide-band light source. Optical signal is converted into electrical signal and read out by on-chip Ge-PD directly. This platform facilitates the development of cost-effective portable point-of-care (POC) diagnostic tool. Meanwhile, this also opens up new ways of electronic and photonic devices monolithically integration in 3D.
更多查看译文
关键词
cmos integrated circuits,chemical sensors,elemental semiconductors,germanium,integrated optoelectronics,monolithic integrated circuits,optical sensors,photodetectors,silicon,silicon-on-insulator,cmos back-end-of-line,oeic,si-ge,cost-effective portable point-of-care diagnostic tool,electrical signal,electronic devices,expensive soi wafer,label-free optical biochemical sensor,laser source,low cost wide-band light source,low-cost bulk-silicon based cmos-compatible 3-dimensional optoelectronic ic platform,monolithic optoelectronic integration circuit,on-chip ge-photodetector,optical functional components,optical signal,photonic devices
AI 理解论文
溯源树
样例
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要