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Considerations on Highly Scalable and Easily Stackable Phase Change Memory Cell Array for Low-Cost and High-Performance Applications

Dae-Hwan Kang,Song Yi Kim,Sang Su Park,Sung Ho Eun, Jong Whan Ma, Jae Hyun Park, Il Mok Park,Kyu Sul Park,Jaehee Oh,Zhe Wu, Jeong Hee Park,Sug Woo Jung,Ho Kyun Ahn,Youngsoo Lim, Sung-Rae Cho,Dong-Ho Ahn,Seok Woo Nam,Gi-Tae Jeong,Gyo Young Jin,Eun Seung Jung

Non-Volatile Memory Technology Symposium（2014）

Cited 8|Views35
Key words
memory subsystem,phase change memory,self-aligned cell patterning,poly Si diode,Damascene Ge-Sb-Te technologies
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