A MEMS design methodology for model-order-reduction, based on high-order parametric elements

The design of a heterogeneous smart system is a major and multidisciplinary challenge. The next generation smart systems will include analog, digital and MEMS components described using different languages relying on parametric models at different abstraction level. The SMArt system Co-design (SMAC) FP7 ICT project aim is the overcome all the issues related to the mixed design of a smart system. Inside this project a step toward design tool integration has been made with the presented work. As a matter of fact, we present a case study for the definition of a complete flow for the design and use of MEMS devices inside standard microelectronics design tools.