Optimized micro-heater structures for tunable silicon multimode interferometers

Rosa, A.,Brimont, A.,Griol, A.,Sanchis, P.

Group IV Photonics（2014）

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摘要

Different micro-heaters structures are analyzed and experimentally demonstrated to optimize the thermo-optic tuning performance of silicon MMIs. A 28dB crosstalk with 65 mW power consumption has been achieved for a double meander structure.

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关键词

elemental semiconductors,light interferometers,micro-optics,optical crosstalk,optical tuning,silicon,thermo-optical effects,Si,crosstalk,double meander structure,optimized microheater structures,power 65 mW,power consumption,thermo-optic tuning performance,tunable silicon multimode interferometers

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