Novel 3D nano-fence matrixes for integrated nanofluidic channels
Nano/Micro Engineered and Molecular Systems（2014）
摘要
Combining the advanced silicon etch system (ASETM) with electron beam lithography (EBL), we utilize the silicon sidewall scallops to fabricate 3D nano-fence matrixes for nanofluidic channels. We acquire the scallop size and the effective range of nano mask width for the formation of nano-fences under a fixed etch recipe. We then realize the controllability of fabricating silicon fences by simply varying the nano mask width. The fence matrixes make the micro-channel into integrated nano-channels, which will be very useful for fluid purification, segregation and bias application in certain fluid detection.
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关键词
electron beam lithography,nanofluidics,3d nanofence matrixes,advanced silicon etch system,fixed etch recipe,integrated nanofluidic channels,silicon sidewall scallops,ebl,icp-drie,nano-fence,nanofluidic channel,sidewall scallop,fluids,etching,apertures,silicon,fabrication,scanning electron microscopy
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