MEMS-based X-ray optics for astronomy, planetary exploration, and earth observation

Yuichiro Ezoe,Tomohiro Ogawa,Masahiro Ikuta,Mayu Sato,Kazuhisa Mitsuda,Hitomi Yamaguchi,Yoshiaki Kanamori,Kohei Morishita,Kazuo Nakajima,Hiroshi Hiroshima,Ryutaro Maeda

Optical MEMS and Nanophotonics（2014）

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摘要

We have been developing novel ultra lightweight X-ray optics based on MEMS technologies, aiming at future space missions whose objectives include X-ray astronomy, planetary exploration, and Earth observation. Sidewalls of DRIE- micro pores through thin silicon wafers are used for X-ray mirrors. Recently, we built a prototype of a 4-inch Wolter type-I optic and fabricated a 12-inch single-stage op-tic. In this paper, we review our development and future space applications.

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关键词

x-ray optics,micromechanical devices,mirrors,space vehicles,drie-micropores,earth observation,mems-based x-ray optics,wolter type-i optic,x-ray astronomy,x-ray mirrors,future space missions,lightweight x-ray optics,planetary exploration,silicon wafers,single-stage optic,size 12 inch,size 4 inch,drie,space application,optical imaging,earth

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