Automated Micro Hall Effect measurements

Dirch Hjorth Petersen,Henrik Hartmann Henrichsen,Rong Lin,P F Nielsen,Ole Hansen

Silicon-Germanium Technology and Device Meeting（2014）

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摘要

With increasing complexity of processes and variety of materials used for semiconductor devices, stringent control of the electronic properties is becoming ever more relevant. Collinear micro four-point probe (M4PP) based measurement systems have become high-end metrology methods for characterization and monitoring of sheet resistance as well as sheet carrier density and mobility via the Micro Hall Effect (MHE) method.

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关键词

hall effect,carrier density,carrier mobility,electrical resistivity,semiconductor materials,automated microhall effect measurements,collinear microfour-point probe based measurement systems,electronic properties,semiconductor devices,sheet carrier density,sheet carrier mobility,sheet resistance,sensitivity,electrodes,system on chip,resistance

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