Technologies of oxide confinement and high contrast grating mirrors for mid-infrared VCSELs
Transparent Optical Networks（2014）
Abstract
A new architecture for mid-infrared (MIR) Vertical Cavity Surface Emitting Laser (VCSEL) is proposed and fabricated. The MIR-VCSEL structure includes both a lateral confinement by an oxide aperture, and a high-contrast sub-wavelength grating mirror (HCG mirror) formed by the high contrast combination AlOx/GaAs, and that replaces conventional GaSb/AlAsSb top Bragg mirror. Upon the GaSb-based half-microcavity bottom part, a metamorphic AlGaAs heterostructure was epitaxially grown to enable thermal oxidation and grating mirror fabrication steps on AlGaAs material platform. The optical design of the VCSEL structure and more precisely the HCG mirror has been optimized thanks to an original methodology based on optimization and anti-optimization methods, resulting in improved parameter tolerances regarding processing errors. After all, we show the complete fabrication of an electrically-pumped MIR monolithic VCSEL structure by integrating this new technological bricks.
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Key words
iii-v semiconductors,aluminium compounds,diffraction gratings,gallium arsenide,laser cavity resonators,mirrors,optimisation,semiconductor epitaxial layers,semiconductor heterojunctions,surface emitting lasers,algaas,alox-gaas,bragg mirror,half-microcavity,high contrast grating mirrors,metamorphic heterostructure,mid-infrared vcsel,optical design,optimization,oxide aperture,oxide confinement,parameter tolerances,thermal oxidation,vertical cavity surface emitting laser,gasb,gas detection,mid-infrared emitter,sub-wavelength high contrast gratings,vertical cavity laser,oxidation
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