Subsurface nanoimaging by broadband terahertz pulse near-field microscopy.

NANO LETTERS(2015)

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摘要
Combined with terahertz (THz) time-domain spectroscopy, THz near-field microscopy based on an atomic force microscope is a technique that, while challenging to implement, is invaluable for probing low-energy light-matter interactions of solid-state and biomolecular nanostructures, which are usually embedded in background media. Here, we experimentally demonstrate a broadband THz pulse near-field microscope that provides subsurface nanoimaging of a metallic grating embedded in a dielectric film. The THz near-field microscope can obtain broadband nanoimaging of the subsurface grating with a nearly frequency-independent lateral resolution of 90 nm, corresponding to similar to lambda/3300, at 1 THz, while the AFM only provides a flat surface topography.
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关键词
Terhertz,near-field microscopy,subsurface nanoimaging,nanospectroscopy
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