Fast Growth Of Graphene Patterns By Laser Direct Writing

APPLIED PHYSICS LETTERS(2011)

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摘要
Rapid single-step fabrication of graphene patterns was developed using laser-induced chemical vapor deposition (LCVD). A laser beam irradiates a thin nickel foil in a CH4 and H-2 environment to induce a local temperature rise, thereby allowing the direct writing of graphene patterns in precisely controlled positions at room temperature. Line patterns can be achieved with a single scan without pre- or postprocesses. Surprisingly, the growth rate is several thousand times faster than that of general CVD methods. The discovery and development of the LCVD growth process provide a route for the rapid fabrication of graphene patterns for various applications. (C) 2011 American Institute of Physics. [doi:10.1063/1.3569720]
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关键词
pulsed laser deposition,pattern formation,room temperature,nickel
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