Study of MoS2/SiC thin films on GCr15 steel substrate

The MoS2/SiC thin films were deposited on GCr15 steel substrate using radio frequency magnetron sputtering technique. Surface morphology, components and mechanical properties of the films were investigated by scanning electron microscopy, energy spectrometer, friction and wear tester and scratch tester, respectively. It was found that the surface morphology of the MoS 2/SiC films prepared on GCr15 steel substrate was vermicular. The SiC inner layer and the MoS2 outer layer were binded tightly with a smooth interface and the thickness of the films was about 0.8 m. The films-substrate system exhibited excellent friction and wear properties with a mean friction coefficient of about 0.11. Interlayers added into the films can improve the cohesion from 21 N to 26 N. © 2011 IEEE.