Signal processing of micro displacement measurement based on laser feedback interference system

2011 IEEE International Conference on Signal Processing, Communications and Computing, ICSPCC 2011(2011)

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摘要
The original experimental signal of laser feedback interference system usually has much noise, which mainly consist of high frequency noise and low frequency fluctuation, and cannot reconstruct micro displacement accurately. In order to improve the accuracy of the reconstruction displacement, the original experimental laser feedback interference signal is preprocessed by filtering the noise. Micro displacement is reconstructed by phase-freezing technology after demodulating the preprocessed signal. The experiment results show that the preprocessed signal makes the accuracy of reconstruction displacement in λ/20 resolution. The reconstruction error of fitting is less than λ/20.
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关键词
demodulation,displacement measurement,laser feedback,laser noise,light interference,measurement by laser beam,optical filters,optical information processing,high frequency noise,laser feedback interference system,low frequency fluctuation,microdisplacement measurement,noise filtering,phase-freezing technology,reconstruction displacement,reconstruction error,signal demodulation,signal processing,displacement measurement,filter,laser feedback interference,phase-freezing technology,reconstruction,
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