Resonant cantilevers with ultra-densely inwall-functionalized mesoporous-silica sensing-layer for detection of ppt-LEVEL TNT
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)（2010）
Abstract
A novel hexa-fluoro-isopropanol-functionalized mesoporous-silica (HFMS) is constructed and loaded on integrated resonant micro-cantilevers for specific detection of trace-level trinitrotoluene (TNT) vapor. With an ultra-high specific-surface-area, an ultra-dense specific sensing-groups and an optimized pore size, the micro/nano combined cantilever sensors have shown TNT detection-limit of about 10ppt. ©2010 IEEE.
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