Development of a monolithic open-loop detection circuit for capacitive accelerometers

Yuesheng Wang,Shiliu Xu,Luncai Liu,Wengang Huang

Guti Dianzixue Yanjiu Yu Jinzhan/Research and Progress of Solid State Electronics（2010）

引用 0|浏览5

暂无评分

摘要

A monolithic detection circuit for capacitive MEMS accelerometers was developed.Instead of using closed-loop techniques,this system employed open-loop detection.When supply voltages was 5 V,power consumption was 9 mW,noise magnitude was lower than 200 μV(12.6 mg),sensitivity was 15.8 mV/g,linear error was 1.8%,test range was+/-100 g.

查看译文

关键词

Accelerometer,Lower noise,Lower power consumption,MEMS

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要