Simulation of light addressable Potentiometric sensors based on MEDICI

Light addressable Potentiometric sensors (LAPS) are the biochemically sensitive semiconductor devices. Its working principles, the charge-distribution models of the electrolyte-insulator (EI) interface and its incorporation with semiconductor's photoelectric effects, are summarized. Then back illuminated LAPS with the structure of Si3N4/Si02/Si is simulated based on MEDICI, one of Synopsys' device simulation tools. The simulated results are compared with what obtained by actual measurement in two main features: characteristic curves of AC photocurrent versus DC bias voltage and the frequency of light intensity modulation. The basic accordance indicates that this MEDICI based approach may be a new possible method for LAPS' simulation.