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面形误差对亚波长金属光栅偏振器性能的影响

Guangzi Xuebao/Acta Photonica Sinica(2009)

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Abstract
基于严格耦合波理论分析了光栅面形误差对亚波长金属光栅偏振器偏振性能的影响.通过对数值结果的分析发现,光栅圆角误差、光栅侧壁倾斜误差和光栅表面粗糙误差对光栅的TM透射效率影响不大,但它们使得光栅的消光比明显降低.因此,面形误差使得光栅的偏振性能明显降低.理论分析表明,顶角为直角、侧壁垂直和表面光滑的理想矩形光栅结构的偏振性能最好.
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Key words
Extinction ratio,Grating profile,RCWT,Sub-wavelength grating,Sub-wavelength wire-grid polarizer,TM transmission efficiency
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