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强激光装置中玻璃疵病在线检测的光学系统设计

Wei-bin DONG,Min ZHANG,Zheng-shang DA,Liang-yi CHEN,Xiao-na DONG,Jun-hua HE

Guangzi Xuebao/Acta Photonica Sinica（2009）

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Abstract
介绍了一种用于玻璃疵病在线检测的近摄工作距成像光学系统,其光组结构形式采用了光阑后置的准远心结构形式,主要光学参量为f′=14 mm;在物像距为250 mm约束条件下,物方视场达到90 mm(对角线);F/number=3.56;光谱适应范围为400～800 nm,对应的空间分辨率为100 lp/mm时,调制传递函数大于0.29.
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Key words
Flat field image,Inspection of optical flaw,Optical design,Optical test
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