Properties of multi-component CrBMoS coatings by pulsed magnetron sputtering from powder targets

CrB 2 and MoS 2 multi-component coatings were prepared by pulsed magnetron sputtering from loosely packed powder targets, with the mixture powder of CrB 2 and MoS 2 at the atomic ratio 1:1. These three materials are known as good corrosion resistance, high hardness and good wear, respectively. Molybdenum disulfide is recognized as a solid lubricant material by virtue of its low friction characteristics. The structures and compositions of the coatings were examined by SEM, XRD and WDX. The study of deposition rate shows that the thicknesses of the coatings strongly depend on the pulsed on factor. The mechanical and tribological properties of the coatings were investigated by adjusting the deposition parameters, which the hardness and friction coefficient of the coatings can be as high as 16GPa and as low as 0.02, respectively. The results show that the coatings prepared from CrB 2 and MoS 2 targets have reasonable hardness and very good wear-resistant property.