Research on novel piezoelectric fast steering mirror

A fast steering mirror based on novel piezoelectric actuator was designed. The size of the mirror was 20 mm×15 mm. The optical scanning angle reached ±0.7°. The first step resonance frequency was 1872 Hz. Fast steering mirror was based on two amplified piezoelectric actuator. The structure was analyzed by finite element analysis software, and the frequency response was measured. The linearity of open loop scanning was improved by using the method of combining software which compensated the hysteretic behavior of piezoelectric actuator and notch filter circuit which restrained the structure resonance of the scanner. Accordingly, the triangle wave with high rate scanning was achieved. The sine wave with high precision scanning was realized by using the digital proportional-integral differential (PID) controller based on repetitive control principle. Test results shown that the scanner can steer the beam at high speed with high precision. The scanner also had other advantages such as small size and simple structure.