Study microstructures of IC and vacuum nanoelectron devices with electron beam nondestructively microscopically layered endoscopy detecting

Wenguo Hu,X Fei,Mingguang Chen,Lin Xiao, Zhuguang Liang, E I Rau,Kailin Zhou,Jian Wang,Dechun Lan,Ping Li

Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009（2009）

引用 0|浏览1

暂无评分

摘要

This paper is introduced untouchedly and nondestructively detect the layered microstructures and defects of the VNED and IC.. This new method is called "Electron Beam Nondestructively Microscopically Layered endoscopy VNED and IC Detecting Method and Instrument". ©2009 IEEE.

查看译文

关键词

nondestructive testing,surface topography,circuits,scanning electron microscopy,microstructure,microstructures,displays,electron beam,nanoelectronics,electron microscopy,integrated circuits

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要