Low-frequency scanning probe acoustic microscopy and its applications

Yadian Yu Shengguang/Piezoelectrics and Acoustooptics(2008)

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Abstract
Low frequency-high resolution scanning probe acoustic microscopy (LF-SPAM) was set up based on the commercial atomic force microscopy, and its working principle and applications to image local structures of ferroelectrics, piezoelectrics and biomaterials were described in the present study. The modulation frequency of LF-SPAM was very low compared to other AFM-base acoustic microscopes, and could be down to several kilo Hertz with ultrahigh resolution of 5 nm. The unique capabilities of LF-SPAM made it to become a promising tool to characterize nanoscale elasticity of inorganic, organic and bio-materials as well.
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Key words
Acoustic imaging,Nano-elasticity,Scanning probe microscopy
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