叠栅条纹信号细分误差的一种动态补偿方法
Guangxue Xuebao/Acta Optica Sinica(2008)
Abstract
缺乏有效的误差补偿方法足制约长光栅测最精度提高的关键原因之一.提出一种动态的误差补偿方法.可以消除由直流漂移、两路信号不等幅和非止交导致的细分误差.其原理是跟踪光栅信号在一个周期上的8个特征值点(正余弦信号的过零点及绝对值交点),从特征值点的幅度值中首先分解出正弦信号的直流漂移误差.对其进行补偿;然后继续跟踪补偿后的信号.从中义能分解出余弦信号的直流漂移误差.再补偿.再跟踪.又能依次分解出不等幅误差和非正交误差.最多只需要3个光栅信号周期,就能对三种误差依次实现补偿.分析了谐波对该方法的影响并提出r改进措施.实验证实了该方法的有效性.
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Key words
optical measurement,dynamic error compensation,continuity of parameters,interpolation error,grating-based nanometrology
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