Defects Around Self-Organized Inas Quantum Dots Measured By Slow Positron Beam
APPLIED PHYSICS LETTERS(2007)
摘要
Self-organized InAs quantum dots (QDs) have been fabricated by molecular beam epitaxy. The authors try to use a slow positron beam to detect defects in and around self-organized QDs, and point defects are observed in GaAs cap layer above QDs. For the self-organized InAs QDs without strain-reducing layer, it is free of defects. However, by introducing a strain-reducing layer, the density of point defects around larger sized InAs QDs increased. The above results suggest that low energy positron beam measurements may be a good approach to detect depth profiles of defects in QD materials. (c) 2007 American Institute of Physics.
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关键词
self organization,quantum dot,molecular beam epitaxy
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