液态金属镓离子源的制备
Weixi Jiagong Jishu/Microfabrication Technology（2007）
Abstract
叙述了为纳米聚焦离子束装置研制的镓液态金属离子源的制备,并对该离子源的I-V特性、角电流密度、稳定性以及寿命等性能进行了测试,结果表明,该源的各项指标均达到了聚焦离子束系统对液态金属离子源的性能要求.
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Key words
Emitting tip,Focused ion beam,Liquid metal ion source,Testing system
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