用于太阳电池吸收层的Cu2ZnSnS4薄膜的制备及其光电特性
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors(2007)
Abstract
采用真空蒸镀技术在钠钙玻璃衬底上蒸镀Cu/Sn/ZnS前驱体,在氮气保护下,硫化制备了Cu2ZnSnS4(CZTS)薄膜.运用X射线衍射仪(XRD)、Hall效应测试仪、紫外-可见光(UV-VIS)分光光度计对样品进行了表征分析,研究了前驱体中预计原子比对CZTS薄膜的晶体结构及光电特性的依赖关系.通过对蒸发源Cu的质量的控制与微调,获得了具有单一相类黝锡矿结构的CZTS薄膜,其对可见光的光吸收系数大于104cm-1、光学禁带宽度约为1.51eV,薄膜的电阻率、载流子迁移率和载流子浓度分别为1.46Ω·cm,4.2cm2/(V·s)和2.37×1018cm-3,适合作为薄膜太阳电池的吸收层.
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Key words
Cu2ZnSnS4,Solar cell,Sulfurization,Vacuum evaporation
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