Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

扫描电镜中的电子反射镜像现象及应用

Yinqi Zhang,Yuan Ji,Yanbao Tian,Jingyong Fu,Xuedong Xu,Lin Dai,Li Wang

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology（2007）

Cited 4|Views1
No score
Abstract
观察非导电样品在扫描电镜(SEM)中产生的电子镜现象.研究了电子镜出现的条件,监测了电子镜像出现过程中表面电势Es和吸收电流Ia的变化.结果表明,当Es达到7kV～9kV时出现了电子镜像.当电子总发射产额σ1,Es4kV,及Ia0时,形成了稳定而无畸变的电子镜像.利用电子镜现象可确定电子散射率及入射电子能量的临界值E2,以及评价非导电样品导电性能.
More
Translated text
Key words
Electron mirror,Non-conducting material,SEM,Surface potential
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined