512×512元高帧速可见光CCD
Bandaoti Guangdian/Semiconductor Optoelectronics（2005）
Abstract
CCD具有低响应非线性、宽光谱响应、低噪声、高动态范围和测光精度,已被广泛应用于许多成像领域.本文介绍了利用三层多晶硅、埋沟、双层金属工艺研制的16抽头512×512元高帧速可见光CCD.测试结果表明,该器件具有高的光响应均匀性、高动态范围和低噪声,并已成功应用于高分辨率高速成像.
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Key words
High frame rate,High-speed imaging,Multi-tap,Visible light CCD
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