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石英管壁厚激光扫描在线检测系统研究

徐熙平,张国玉,付秀华,安志勇,李成志,杨继兴

Binggong Xuebao/Acta Armamentarii（2004）

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Abstract
基于光电传感和激光扫描检测技术,本文提出了一种石英管壁厚激光扫描在线检测系统,采用激光后扫描方法对以一定角度入射到石英管侧面,经其内外表面反射后的两束激光光束的空间位置进行测量,解决了石英管壁厚非接触在线测量问题.文中详细论述了系统的总体结构、检测原理及信号处理系统.通过实验对系统的测量精度进行了验证,结果表明系统测量精度达±0.01mm.
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Key words
Instrument and metering,Laser-scanning,On-line inspection,Quartz-tube,Thickness measurement
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