Three-Dimensional Electrochemical Generating Micromachining

This paper presents a new method for three-dimensional microstructure machining, electrochemical generating micromachining (EGMM). In electrochemical machining, with the application of ultrashort voltage pulses between the tool electrode and the workpiece, the physical and chemical performance in the inter-electrode gap is greatly improved, making the distance between two electrodes reduced to micrometer or submicrometer. As a result, the concentrative dissolution of anodic is increased and the higher precision in ECM can be obtained. Fabricating a universal micro tool electrode on-line and driving it along a defined trajectory of the workpiece surface within a extremely close working space, a 3D microstructure with complex shapes will be machined successfully. A new device was designed to realize the EGMM process, which possesses the five axis with three sliding degrees and two revolving degrees, driven by step motors. It is able to accomplish the shaping of tool electrode and produce a 3D workpiece with high precision.