SrxBa1-xNb2O6 optical waveguiding thin films on SiO2 coated Si(100) substrates
JOURNAL OF THE KOREAN PHYSICAL SOCIETY(1998)
摘要
Waveguide structures of SrxBa1-xNb2O6 (x = 0.5) (abbreviated as SBN:0.5) films on SiO2 coated Si substrates are potential components for application of integrated electro-optic devices. SBN:0.5 optical waveguiding thin films on SiO2 coated Si substrates with a very thin MgO diffusion buffer have been successfully prepared by pulsed laser deposition. The as-grown films have a refractive index of 2.28 which is close to the bulk SBN. X-ray analysis showed that the as grown films are single-phase tetragonal tungsten bronze structure. The SBN:0.5 thin films prepared by PLD exhibit favorable optical waveguiding properties. The composition and the morphology of the films were also examined by XPS and SEM respectively. Ferroelectric SBN:0.5 optical waveguiding thin films on SiO2 coated Si substrates are expected to be used in the integrated electro-optic devices.
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