Effect of vacuum heat pre-treatment on properties of CdSe multilayer target used for FPC

New multilayers CdSe photoconductive target consisting of 5 layers, SnO2-CdSe-CdSeO3-As2Se3-Sb2S3, with a junction-type structure and remarkable performances are fabricated. A new heat treating technology consisted of both of the vacuum heat pre-treatment technology (VHPT) and the non-vacuum heat after-treating technology (NHAT) is also developed. The combined heat treatments of VHPT and NHAT caused a perfect crystallites structure and a good tube performance. There are three factors effecting this process. They are the temperature of the conducting VHPT, the time of conducting the VHPT and the condition of the substrate rotation.