Metal-Insulator-Semiconductor Structure Single Crystal Silicon Liquid-Crystal Light Valve
Proceedings of SPIE - The International Society for Optical Engineering(1996)
Abstract
Detailed description of the structure, operation, fabrication, and performance of a fast-response meteal-insulator-semiconductor structure single crystal silicon liquid crystal light valve (MIS-Si-LCLV) is given. A 45�� twisted nematic liquid crystal configuration has been utilized. A MIS-Si-LCLV is demonstrated with a limiting resolution of 40 lp/mm over a 45 mm aperture and contrast ratios of > 50:1, input light sensitivities at �� = 930 nm (���� = 40 nm) of better than 30 �� W/cm 2 and response times as fast as 20 ms have been measured.
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Key words
silicon,liquid crystals,metals,liquid crystal,semiconductors,fabrication,crystals
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