Quantitative analysis of composition for quaternary alloy ZnMgSSe by auger electron spectroscopy

High quality quaternary alloy Zn1-xMgxSySe1-y films have been grown by Molecular Beam Epitaxy (MBE) on GaAs(100) substrate. Based on the investigation of the samples by auger electron spectroscopy (AES), x-ray diffraction (XRD) and Raman scattering (RS), a simple method to determine the composition of quaternary alloy has been set forth. The method of relative sensitivity factor of AES is used to accurately determine the composition of the quaternary alloy ZnMgSSe by calibrating the values of relative sensitivity factors of every element through the techniques of XRD and RS.