Quantitative analysis of Si in AlxGa1-xAs using quadrupole-based SIMS instrument

Experimental methods in quantitative analysis of Si in AlxGa1-xAs using MIQ156 quadrupole-based SIMS instrument have been discussed. Reproducibility of the experimental results and the dependence of RSF for Si upon x have been studied. Comparisons between the results obtained from MIQ-156 and IMS-4f SIMS instruments have been made. The detection limit of 4��1015cm-3 for 29Si atoms is obtained by using Cs+ primary ion beam on MIQ-156.