Effect of oxygen concentration on optical properties of CdIn2O4 film deposited by RF reactive sputtering

The optical properties of CdIn2O4 film deposited by RF reactive sputtering from a Cd-In target in an Ar + O2 reactive gas mixture were studied. The refractive index and extinction coefficient of the film decreased with the increase of oxygen concentration while the optical transmittance increased. The experimental results were discussed theoretically in terms of crystal structure expansion and the variation of carrier concentration.