A New Development Of Laser Dynamic Precision Measurer Of Fine Wire Diameters

On the basis of previous research results, we enlarge the measurement range of system by developing the measurement method of diameter using optical Fourier Tranformation. The measurment precision of system is improved for the employment of the technique of accurate location of frequency-spectrum plane. The dynamic measurment precision is better than 0.5% for fine wire whose diameter is under 10 mu m.