Study On The Mechanical Properties Of Dlc Thin Films Doped With Cu
ADVANCES IN MACHINING AND MANUFACTURING TECHNOLOGY XII(2014)
Abstract
Samples of DLC thin films with different Cu concentration were prepared by using a Cu target and different number of graphite target, or adding a grid before the Cu target. The results show that the hardness and stress decreases with an increase of Cu concentration (below 6.3 at.%). When Cu concentration increases from 6.3 at.% to 17.8 at.%, the hardness and stress keep almost constant, and the friction coefficient increases gradually and slowly, as well as the wear loss.
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Key words
DLC,thin films,Cu-doped,stress,hardness
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