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Study On The Mechanical Properties Of Dlc Thin Films Doped With Cu

ADVANCES IN MACHINING AND MANUFACTURING TECHNOLOGY XII(2014)

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Abstract
Samples of DLC thin films with different Cu concentration were prepared by using a Cu target and different number of graphite target, or adding a grid before the Cu target. The results show that the hardness and stress decreases with an increase of Cu concentration (below 6.3 at.%). When Cu concentration increases from 6.3 at.% to 17.8 at.%, the hardness and stress keep almost constant, and the friction coefficient increases gradually and slowly, as well as the wear loss.
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Key words
DLC,thin films,Cu-doped,stress,hardness
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