Broad band beam splitter based on the double-groove fused silica grating

In this paper, we propose a broad band 1×3 beam splitter operating in the telecommunication wavelength band under normal incidence, this device consisting of a double-groove fused silica grating layer is designed with using the inverse mathematical method and rigorous vector diffraction theory. It is shown from our calculations that the device presents excellent beam splitter ability for TE polarization light with the average diffraction efficiencies is more than 95% over ∼100nm wavelength range, moreover, the uniformity of our beam splitter is better than 2% in the whole wavelength band. Furthermore, the physical understanding of the diffraction behaviors taking place inside the beam splitter gratings can be explained by the modal method.