Influence of Al2O3 layer thickness on high-temperature stability of TiAlN/Al2O3 multilayers
Applied Surface Science（2013）
Abstract
•TiAlN/Al2O3 multilayer has potential on quality in protective coating in dry machining.•The mechanical properties strongly depended on the thickness of Al2O3 layer.•Annealing is found to be benefit for thermal stability.•The highest elastic modulus of 560GPa appears at lAl2O3=1.2nm at 700°C.•Thermal stable interface and layered structure contribute to high-T stable hardness.
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Key words
TiAlN/Al2O3 multilayers,Thermal stability,Hardness,Magnetron sputtering,Layer thickness
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