Flow characteristics of H-type micro pump based on piezoelectric ultrasonic streaming

An H-type micro pump based on piezoelectric ultrasonic streaming is designed according to the principle of acoustic streaming, and the influence factors on its average outlet velocity is analyzed. The acoustic streaming velocity vector in the micro pump body is calculated through a direct streaming method and the body structure optimization is completed. The relationships among average outlet velocity and vibration displacement, driving frequency and fluid kinematic viscosity are analyzed. Then the influence of back pressure on the average outlet velocity is simulated. The simulation results show that when the fluid kinematic viscosity is small, the H-type micro pump based on ultrasonic streaming possesses better pumping performance. The pumping velocity can be easily controlled by changing the driving frequency or voltage.