High-Q polyimide-based spiral inductors with magnetic core for RF telemetry applications

XuMing Sun, Yang Zheng,Zhongliang Li,Xiuhan Li,Haixia Zhang

NEMS（2013）

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摘要

This paper presents a new high quality factor (Q) and large inductance (L) stacked polyimide-based spiral inductor. Polyimide (PI) is used as the substrate and the insulation layer to provide good biocompatibility. To achieve multilayers, self-planarization of PI on the surface with 10μm steps was realized. Meanwhile, Ni80Fe20 was successfully electroplated to enhance the performance of inductors. The double-layer inductor shows a maximum Q of 12.7 and a large L of 7.078μH at 5.54MHz. Considering the area of the coil, the inductance density is as high as 62nH/mm2. Based on this inductor, the wireless power transmission (WPT) system was built and tested. The minimum attenuation is -9.4dB at 1.8MHz. With the full IC-compatible fabrication process, this coil could be used in many implantable devices.

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关键词

frequency 5.54 mhz,biocompatibility,q-factor,large inductance stacked polyimide-based spiral inductor,insulation,coils,inductance density,radiofrequency power transmission,pi self-planarization,electroplating,wpt system,rf telemetry applications,insulation layer,implantable devices,frequency 1.8 mhz,wireless power transmission,ic-compatible fabrication process,double-layer inductor,magnetic cores,high-q polyimide-based spiral inductors,microfabrication,mems iductor,electrodeposition,electroplation,multilayers,high quality factor,magnetic core,inductance,inductors,telemetry,fabrication,q factor

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