Flexible MEMS inductors based on Parylene-FeNi Compound Substrate for wireless power transmission system
NEMS（2013）
摘要
In this paper, flexible MEMS inductors based on Parylene-FeNi Compound Substrate (PFCS) were designed, fabricated and analyzed. We choose parylene as substrate to achieve flexibility and good bio-compatibility. Then, a Ni80Fe20 magnetic film was deposited on the parylene film to form a compound substrate. Moreover, a Ni80Fe20 core was also deposited in the center of the spiral inductor to improve its performance. As the radius of magnetic core increased from 800μm to 1200μm, the maximum quality factor and the inductance increased by 288% (from 4.10 to 15.91) and 297% (from 265.94nH to 1.06uH), respectively. If we replaced the magnetic core with magnetic array, the maximum quality factor and the inductance could improve by 111.45% (from 6.29 to 13.30) and 102.78% (from 470.97nH to 955.05nH). Finally, the PFCS inductors were tested in our experimental system.
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关键词
q-factor,parylene substrate,micromechanical devices,inductor,magnetic array,quality factor,inductive power transmission,soft magnetic materials,nickel compounds,parylene-ferronickel compound substrate,magnetic thin films,radius 800 mum to 1200 mum,ferromagnetic materials,spiral inductor,pfcs inductors,magnetic cores,flexible electronics,parylene film,magnetic film,microfabrication,flexible mems inductors,high inductance and quality factor,wireless power transmission system,ferronickel soft magnetic material,magnetic core,ni80fe20,inductors,q factor,inductance,testing
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