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X-ray photoemission spectroscopy studies of indium-tin-oxide films treated by oxygen plasma immersion ion implantation

Long He,Xiaoxuan Fan,Qiongrong Ou,Rongqing Liang

Optics InfoBase Conference Papers（2012）

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Abstract
Oxygen plasma immersion ion implantation (PIII) was introduced to modify indium-tin-oxide (ITO) films. X-ray photoemission spectroscopy (XPS) was employed to characterize the elements ratio and core level spectra of O1s at the surface of ITO. © 2012 OSA.
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