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一种高指向性MEMS声矢量传感器结构设计与分析

Zhenya LIU,Weizheng YUAN,Jinjun DENG,Sen REN,Chengyu MA

Yadian Yu Shengguang/Piezoelectrics and Acoustooptics（2012）

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Abstract
设计了一种高指向性微机电系统(MEMS)声矢量传感器,结构采用了硅-玻璃(SOG)工艺,增大流体间隙,减小振动阻尼,并利用ANSYS软件分析了流体间隙对指向性的影响,以验证结构的高指向性.结果表明,在流体间隙从5 μm增大到30 μm时,振动振幅增大30倍,相位差最高增大126°,当入射角度变化量为80°时,相位差变化量增大了40°,传感器指向性得到了显著提高.此种设计有助于促进声矢量传感器的发展.
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Key words
Acoustic vector sensor,Fluid gap,High directivity,MEMS,Phase difference
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