Well aligned single-walled carbon nanotube (SWNT) film as a building block for MEMS/NEMS devices

SWNTs are among the strongest known fibers with low density, high thermal conductivity, high piezoresistivity, and can survive in 2-300 degrees C in oxygenic environment and similar to 900 degrees C in vacuum. Some fundamental MEMS/NEMS components, especially beams and cantilevers, will have broad applications if they are made of aligned dense SWNTs. In this paper, a fabrication process of SWNT nanoscale beams and cantilevers are presented, and some application examples like microfluidic devices are introduced.