Analysis Of Chemical Polishing For Optical Elements

It is impossible to polish the groove or channel's surface by traditional method. Chemical polishing, using solutions to erode glass, is adopted in this paper with the aim for getting smooth surface. Nature of glass, composition of polishing slurry, type of polishing products, and some process parameters are studied; in the meanwhile, SEM, metallurgical microscope, profile meter and Visible-UV spectrophotometer are utilized. The result shows that the polished surfaces with high quality depend on the buffering effect of polishing solution, high solubility to polishing products, smaller size of generated salt crystal. Also, it is indispensable to select proper temperature, time and removal rate to realize precision polishing.