Design and process simulation on power device igbt

PROCEEDINGS OF THE 2ND INTERNATIONAL CONFERENCE ON ELECTRONIC & MECHANICAL ENGINEERING AND INFORMATION TECHNOLOGY (EMEIT-2012)(2012)

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摘要
An igbt cell structure based on semiconductor physics were designed. The process parameters of the high-voltage igbt have been calculated and adjusted. Using the optimal device's dimensions, the doping concentration was analyzed systematically. Additionally, a simulating model of igbt was compiled based on sentaurus process. According to this model simulation, an optimized device parameters' design was further determined. Finally, the device drain-source breakdown voltage has satisfied a standard value of 1450v. whereas its threshold voltage is 4.2v, which is in the prerequisite range of 3 similar to 5v.
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关键词
IGBT,Breakdown voltage,ON-resistance,TCAD
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