Real analysis of residual gas in electrical tube
Vacuum Electronics Conference（2012）
Abstract
With the feature of small vacuum chamber and resistant over 450°C baking in vacuum, micro-chamber quadruple mass spectrometer (MCQMS) can seal together with the tube and seal off after the same exhaust process. Thus the residual gas composition within the tube can be monitored truly in the process of entire life of tube. In this paper, the results of analyzing the residual gas by using of MCQMS instead of conventional quadruple mass spectrometry were given.
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Key words
chemical analysis,small vacuum chamber,vacuum tubes,microchamber quadruple mass spectrometer,electrical tube,mcqms,mass spectrometers,residual gas,quadruple mass spectrometer,tube,heating,gettering,cathodes,anodes,ionization
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